适合人群:Engineers, Researchers, Technicians, Graduate Students, Undergraduate Students, Industry Professionals, Technology Enthusiasts, anyone interested in the field of semiconductor and microelectronics
For the introductory course in Semiconductor Manufacturing Technology. This text introduces the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications.
ISBN:9780130815200
出版日期:2000-11-19 适合人群:Engineers, Researchers, Technicians, Graduate Students, Undergraduate Students, Industry Professionals, Technology Enthusiasts, anyone interested in the field of semiconductor and microelectronics