沃新书屋 - Semiconductor Manufacturing Technology - 出版社:Financial Times/ Prentice Hall

Financial Times/ Prentice Hall

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For the introductory course in Semiconductor Manufacturing Technology. This text introduces the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications.