沃新书屋 - Semiconductor Devices - 出版社:Ellis Horwood Ltd, Chichester (John Wiley, New York)

Ellis Horwood Ltd, Chichester (John Wiley, New York)

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This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.