This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
ISBN:9780471333722
出版日期:2001-09-07 适合人群:Engineers, Physics Students, Electrical Engineering Students, Semiconductor Industry Professionals, Researchers in Material Science