Richardson, Mark Thomas

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High Resolution Lithography-Compatible Micro-Electro-Discharge Machining of Bulk Metal Foils for Micro-Electro-Mechanical Systems.书籍相关信息

ISBN：9781244006904
作者：Richardson, Mark Thomas
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页数：190
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适合人群：Engineers and researchers in the fields of microelectronics, materials science, semiconductor fabrication, and mechanical engineering, particularly those interested in advanced manufacturing processes and micro-scale technologies.
TAG：Material Processing / Semiconductor Fabrication / Micro-Electro-Discharge Machining (MEDM) / Micro-Electro-Mechanical Systems (MEMS) / High Resolution Lithography / Bulk Metal Foils
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更新时间：2025-05-17 03:19:45

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ISBN：9781244006904
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适合人群：Engineers and researchers in the fields of microelectronics, materials science, semiconductor fabrication, and mechanical engineering, particularly those interested in advanced manufacturing processes and micro-scale technologies.